Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope

Qinghua Wang; Shien Ri; Hiroshi Tsuda; Takashi Tokizaki

doi:doi:10.11648/j.optics.s.2015040301.20

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Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope

Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki

Published in Optics (Volume 4, Issue 3-1)

Received: 31 March 2015 Accepted: 31 March 2015 Published: 14 March 2016

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Abstract

A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.

Published in	Optics (Volume 4, Issue 3-1) This article belongs to the Special Issue Optical Techniques for Deformation, Structure and Shape Evaluation
DOI	10.11648/j.optics.s.2015040301.20
Page(s)	43-49
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2016. Published by Science Publishing Group

Keywords

Deformation Measurement, Strain, High Speed, Fast Scanning Moiré Method, Microscope, Grating

References

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APA Style

Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. (2016). Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics, 4(3-1), 43-49. https://doi.org/10.11648/j.optics.s.2015040301.20

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ACS Style

Qinghua Wang; Shien Ri; Hiroshi Tsuda; Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016, 4(3-1), 43-49. doi: 10.11648/j.optics.s.2015040301.20

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AMA Style

Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016;4(3-1):43-49. doi: 10.11648/j.optics.s.2015040301.20

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@article{10.11648/j.optics.s.2015040301.20,
  author = {Qinghua Wang and Shien Ri and Hiroshi Tsuda and Takashi Tokizaki},
  title = {Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope},
  journal = {Optics},
  volume = {4},
  number = {3-1},
  pages = {43-49},
  doi = {10.11648/j.optics.s.2015040301.20},
  url = {https://doi.org/10.11648/j.optics.s.2015040301.20},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.optics.s.2015040301.20},
  abstract = {A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.},
 year = {2016}
}

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TY  - JOUR
T1  - Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope
AU  - Qinghua Wang
AU  - Shien Ri
AU  - Hiroshi Tsuda
AU  - Takashi Tokizaki
Y1  - 2016/03/14
PY  - 2016
N1  - https://doi.org/10.11648/j.optics.s.2015040301.20
DO  - 10.11648/j.optics.s.2015040301.20
T2  - Optics
JF  - Optics
JO  - Optics
SP  - 43
EP  - 49
PB  - Science Publishing Group
SN  - 2328-7810
UR  - https://doi.org/10.11648/j.optics.s.2015040301.20
AB  - A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.
VL  - 4
IS  - 3-1
ER  -

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Author Information

Qinghua Wang

Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Shien Ri

Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Hiroshi Tsuda

Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Takashi Tokizaki

Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

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Plain Text BibTeX RIS

APA Style

Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. (2016). Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics, 4(3-1), 43-49. https://doi.org/10.11648/j.optics.s.2015040301.20

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ACS Style

Qinghua Wang; Shien Ri; Hiroshi Tsuda; Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016, 4(3-1), 43-49. doi: 10.11648/j.optics.s.2015040301.20

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AMA Style

Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016;4(3-1):43-49. doi: 10.11648/j.optics.s.2015040301.20

Copy | Download

@article{10.11648/j.optics.s.2015040301.20,
  author = {Qinghua Wang and Shien Ri and Hiroshi Tsuda and Takashi Tokizaki},
  title = {Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope},
  journal = {Optics},
  volume = {4},
  number = {3-1},
  pages = {43-49},
  doi = {10.11648/j.optics.s.2015040301.20},
  url = {https://doi.org/10.11648/j.optics.s.2015040301.20},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.optics.s.2015040301.20},
  abstract = {A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.},
 year = {2016}
}

Copy | Download

TY  - JOUR
T1  - Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope
AU  - Qinghua Wang
AU  - Shien Ri
AU  - Hiroshi Tsuda
AU  - Takashi Tokizaki
Y1  - 2016/03/14
PY  - 2016
N1  - https://doi.org/10.11648/j.optics.s.2015040301.20
DO  - 10.11648/j.optics.s.2015040301.20
T2  - Optics
JF  - Optics
JO  - Optics
SP  - 43
EP  - 49
PB  - Science Publishing Group
SN  - 2328-7810
UR  - https://doi.org/10.11648/j.optics.s.2015040301.20
AB  - A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.
VL  - 4
IS  - 3-1
ER  -

Copy | Download